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MarSurf CD 280
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MarSurf CD 140
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Resolution
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max. 6 nm (with 210 mm probe arm)
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max. 6 nm (with 210 mm probe arm)
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Start of traversing length (in X)
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0.1 mm
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0.1 mm
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Probe arm length
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210 mm; 350 mm; 490 mm
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210 mm; 350 mm; 490 mm
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End of traversing length (in X)
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280 mm
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140 mm
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Positioning speed
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0.02 – 200 mm/s (in X)
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0.02 – 200 mm/s (in X)
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Guide deviation
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0,35 µm / 60 mm 0,4 µm / 140 mm 0,75 µm / 280 mm |
0.35 µm / 60 mm 0.4 µm / 140 mm |
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Measuring speed
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0.02 – 10 mm/s
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0.02 – 10 mm/s
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Measuring range mm
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70 mm (in Z with 350 mm probe arm) max. 100 mm (with 490 mm probe arm) |
70 mm (in Z with 350 mm probe arm) max. 100 mm (with 490 mm probe arm) |
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Measuring force (N)
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4 mN to 30 mN, in Z+ and Z-, adjustable via software
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4 mN to 30 mN, in Z+ and Z-, adjustable via software
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