Measuring principle | Stylus method |
|---|---|
Probe | BFW skidless system with MarSurf SD 26 drive unit and/or PHT skidded system with MarSurf RD 18 drive unit |
Measuring range mm | +/- 250 µm (up to +/- 750 µm with 3x probe arm length) applies to BFW system350 µm applies to PHT probe system |
Filter according to ISO/JIS | filter as per ISO 16610-21(replaced Gaussian filter as per ISO 11562), robust Gaussian filter a per ISO 16610-31 |
Traversing lengths | MarSurf GD 26 / SD 26: Automatic; 0.56 mm*; 1.75 mm; 5.6 mm; 17.5 mm, 56 mm,Measurement up to stop, variable* Traversing length dependent on drive unitRD 18: Automatic; 1.75 mm; 5.6 mm; 17.5 mm |
Number n of sampling length according to ISO/JIS | 1 to 50 (default: 5) |
Stylus | 2 µm |
Measuring force (N) | 0.75 mN |
Surface parameters | Over 80 surface parameters for R, P and W profiles according to current ISO/JIS or MOTIF standards (ISO 12085) |