MarSurf VD 280 | MarSurf VD 140 | |
Start of traversing length (in X) | 0 mm | 0 mm |
End of traversing length (in X) | 280 mm | 140 mm |
Positioning speed | 0.02 - 200 mm/s (in X) | 0.02 - 200 mm/s (in X) |
Guide deviation | 0.07 µm / 20 mm (with probe system BFW 250)0.35 µm / 60 mm0.4 µm / 140 mm | 0.07 µm / 20 mm (with probe system BFW 250)0.35 µm / 60 mm0.4 µm / 140 mm |
Measuring speed | Up to 10 mm/s | Up to 10 mm/s |
Measuring range mm | with probe system BFW 250500 µm (±250 µm) for probe arm length 45 mm1500 µm (±750 µm) for probe arm length 135 mmwith probe system C 1170 mm with probe arm length 350 mmmax. 100 mm with probe arm length 490 mm | with probe system BFW 250500 µm (±250 µm) for probe arm length 45 mm1500 µm (±750 µm) for probe arm length 135 mmwith probe system C 1170 mm with probe arm length 350 mmmax. 100 mm with probe arm length 490 mm |