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MAHR MarSurf UD 130 Combined contour and surface measuring station

MarSurf UD 130

The MarSurf UD 130 closes the gap between the high-end solution MarSurf LD 130 / LD 260 and the new standard combination measuring station MarSurf VD 140 / 280 with two drive units. The technical specification of the MarSurf UD 130 is based on the high-quality interferometric probe system and the fast measuring and positioning speeds that have reduced the measuring times for each workpiece.

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Description

MarSurf UD 130 Combined contour and surface measuring station

Technical data

Resolution	2 nm
Start of traversing length (in X)	0.1 mm
End of traversing length (in X)	130 mm
Positioning speed	0.1 mm/s to 30 mm/s
Measuring speed	0.1 mm/s to 5 mm/s; for roughness measurements 0.1 mm/s to 0.5 mm/s are recommended
Probe	Standard probe LP-D 14-10-2/60°
Measuring range mm	10 mm (100 mm probe arm) 20 mm (200 mm probe arm)
Profile resolution	2 nm
Traversing lengths	0.1 mm to 130 mm
Measuring force (N)	1 mN to 30 mN, software-adjustable

Resolution

2 nm

Start of traversing length (in X)

0.1 mm

End of traversing length (in X)

130 mm

Positioning speed

0.1 mm/s to 30 mm/s

Measuring speed

0.1 mm/s to 5 mm/s;

for roughness measurements

0.1 mm/s to 0.5 mm/s are recommended