MarSurf GD 280 | MarSurf GD 140 | |
Resolution | Measuring range 1: 7.6 nmMeasuring range 2: 0.76 nm | Measuring range 1: 7.6 nmMeasuring range 2: 0.76 nm |
Start of traversing length (in X) | 0 mm | 0 mm |
Probe arm length | 45 mm (x 1)67.5 mm (x 1,5)90 mm (x 2)112.5 mm (x 2,5)135 mm (x 3) | 45 mm (x 1)67.5 mm (x 1,5)90 mm (x 2)112.5 mm (x 2,5)135 mm (x 3) |
End of traversing length (in X) | 280 mm | 140 mm |
Positioning speed | 0.02 - 200 mm/s (in X) | 0.02 - 200 mm/s (in X) |
Guide deviation | 0.07 µm / 20 mm0.2 µm / 60 mm0.4 µm / 140 mm | 0.07 µm / 20 mm0.2 µm / 60 mm0.4 µm / 140 mm |
Measuring speed | Up to 10 mm/s | Up to 10 mm/s |
Measuring range mm | 500 µm (±250 µm) for probe arm length 45 mm1500 µm (±750 µm) for probe arm length 135 mm | 500 µm (±250 µm) for probe arm length 45 mm1500 µm (±750 µm) for probe arm length 135 mm |