MarSurf CD 280 | MarSurf CD 140 | |
Resolution | max. 6 nm (with 210 mm probe arm) | max. 6 nm (with 210 mm probe arm) |
Start of traversing length (in X) | 0.1 mm | 0.1 mm |
Probe arm length | 210 mm; 350 mm; 490 mm | 210 mm; 350 mm; 490 mm |
End of traversing length (in X) | 280 mm | 140 mm |
Positioning speed | 0.02 - 200 mm/s (in X) | 0.02 - 200 mm/s (in X) |
Guide deviation | 0,35 µm / 60 mm0,4 µm / 140 mm0,75 µm / 280 mm | 0.35 µm / 60 mm0.4 µm / 140 mm |
Measuring speed | 0.02 - 10 mm/s | 0.02 - 10 mm/s |
Measuring range mm | 70 mm (in Z with 350 mm probe arm)max. 100 mm (with 490 mm probe arm) | 70 mm (in Z with 350 mm probe arm)max. 100 mm (with 490 mm probe arm) |
Measuring force (N) | 4 mN to 30 mN, in Z+ and Z-, adjustable via software | 4 mN to 30 mN, in Z+ and Z-, adjustable via software |