| Specifications | WLI 2.5x | WLI 5x | WLI 10x | WLI 20x | WLI 50x | WLI 100x | |
| Resolution | 0.1 nm | 0.1 nm | 0.1 nm | 0.1 nm | 0.1 nm | 0.1 nm | |
| Lateral resolution (X/Y) | 4.81 µm | 4.81 µm | 1.2 µm | 0.9 µm | 0.66 µm | 0.52 µm | |
| Measuring range | 400 µm | 400 µm | 400 µm | 400 µm | 400 µm | 400 µm | |
| Measuring range X/Y | ~4536 µm x~3447 µm | ~2268 µm x~1723 µm | ~1134 µm x~861 µm | ~567 µm x~430 µm | ~226 µm x ~172 µm | ~113 µm x ~86 µm | |
| Optical Zoom | 2.5x | 5x | 10x | 20x | 50x | 50x | |
| Working distance | ~10.3 mm | ~9.3 mm | ~7.4 mm | ~4.7 mm | ~3.4 mm | ~3.4 mm | |