Roundness deviation (µm+µm/mm measuring height) * | 0,01 + 0,0002 |
|---|---|
Roundness deviation (µm+µm/mm measuring height) ** | 0,02 + 0,0004 |
Axial runout deviation (µm+µm/mm measuring radius) * | 0,02 + 0,0002 |
Axial runout deviation (µm+µm/mm measuring radius) ** | 0,04 + 0,0004 |
Centering and tilting table | automatic |
Table diameter (mm) | 180 |
Table load capacity, centered (N) | 200 |
Speed (rpm) 50 Hz / 60 Hz | 0.1 to 200 |
Straightness deviation / 100 mm measuring path (µm)**, Z axis | 0.1 |
Straightness deviation / total measuring path (µm)**, Z axis | 0.3 |
Parallelism deviation Z-/C axis in tracing direction, measuring path (µm) | 0.6 |
Measuring speed (mm/s), Z axis | 0.1 to 50 |
Positioning speed (mm/s), Z axis | 0.1 to 50 |
Straightness deviation / total measuring path (µm)**, X axis | 0.3 |
Perpendicularity X/C axis, measuring path (µm) | 0.3 |
Positioning speed (mm/s), X axis | 0.1 to 50 |
Measuring speed (mm/s), X axis | 0.01 to 50 |